Shared User and Principal Investigator Laboratories
Micro/nano Device Fabrication lab
Shared User: Micro and Nano-Scale Device and Structure Fabrication
18,500 square feet of semiconductor/MEMS cleanroom space and a fully equipped mask fabrication facility, as well as 5,000 square feet of biological cleanroom space rated up to Biosafety Level 2 in two buildings.
These labs include Class 1000 to 100,000 cleanroom environments for the substrate fabrication, interconnect circuitry, and assembly processes needed for research integration and to provide functional sub-system test vehicles.